Post-Processing Techniques for Integrated MEMS

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Jul 262015
 

The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.

Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (Nano- and Microscience, Engineering, Technology, and Medicine Series)

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Jul 232015
 
Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (Nano- and Microscience, Engineering, Technology, and Medicine Series)
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Amazon Price: $125.95 $119.13 You save: $6.82 (5%). (as of August 30, 2015 8:48 pm – Details). Product prices and availability are accurate as of the date/time indicated and are subject to change. Any price and availability information displayed on the Amazon site at the time of purchase will apply to the purchase of this product.

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.
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