How to model dome of mems encapsulation with thickness 250um, rdius 3010um,lateral length 2400um?

Posted by admin on Apr 4th, 2009 | 0 comments home title

fadly asked:

3d modeling using matlab, notice that the dome encapsulation have free space for mems movements part at the centre bottom of dome. any body can help me..?

Microelectromechanical Systems

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How to model dome of mems encapsulation with thickness 250um, rdius 3010um,lateral length 2400um?

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